Method to improve field alignment registration accuracy in VLSI lithography

被引：0
|
作者：
Liu, Jianhai [1 ]
Wang, Bin [1 ]
Zhang, Xiaoping [1 ]
Li, Bing-Zong [1 ]
机构：
[1] Advanced Semiconductor Manufacturing, Corp of Shanghai, Shanghai, China
来源：
International Conference on Solid-State and Integrated Circuit Technology Proceedings | 1998年
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：109 / 112
相关论文
共 50 条
  • [41] Calibration method for mask grating mark imaging in lithography alignment
    Zhu, J. (zsyioe@163.com), 1600, Science Press (40):
  • [42] A Study of an Alignment-less Lithography Method as an Educational Resource
    Kai, Kazuho
    Shiota, Koki
    Nagaoka, Shiro
    Mahmood, Mohamad Rusop Bin Haji
    Kawai, Akira
    INTERNATIONAL CONFERENCE ON NANO-ELECTRONIC TECHNOLOGY DEVICES AND MATERIALS (IC-NET 2015), 2016, 1733
  • [43] Self-Supervised Shape Alignment for Sports Field Registration
    Shi, Feng
    Marchwica, Paul
    Higuera, Juan Camilo Gamboa
    Jamieson, Mike
    Javan, Mehrsan
    Siva, Parthipan
    2022 IEEE WINTER CONFERENCE ON APPLICATIONS OF COMPUTER VISION (WACV 2022), 2022, : 3768 - 3777
  • [44] Phase demodulation method for fringe pattern In alignment of nanometer lithography
    Xu, Feng
    Hu, Song
    Luo, Zhengquan
    Zhou, Shaolin
    5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS, 2010, 7657
  • [45] Automated Registration of Multimodal Optic Disc Images: Clinical Assessment of Alignment Accuracy
    Ng, Wai Siene
    Legg, Phil
    Avadhanam, Venkat
    Aye, Kyaw
    Evans, Steffan H. P.
    North, Rachel V.
    Marshall, Andrew D.
    Rosin, Paul
    Morgan, James E.
    JOURNAL OF GLAUCOMA, 2016, 25 (04) : 397 - 402
  • [46] Image processing using shape recognition for alignment to damaged registration marks in electron beam lithography
    Kratschmer, E.
    Klaus, D. P.
    Viswanathan, R.
    Turnidge, M. L.
    Reed, P. L.
    McPhail, B.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 27 (06): : 2563 - 2568
  • [47] Accuracy of deformable image registration techniques for alignment of longitudinal cholangiocarcinoma CT images
    Sen, Anando
    Anderson, Brian M.
    Cazoulat, Guillaume
    McCulloch, Molly M.
    Elganainy, Dalia
    McDonald, Brigid A.
    He, Yulun
    Mohamed, Abdallah S. R.
    Elgohari, Baher A.
    Zaid, Mohamed
    Koay, Eugene J.
    Brock, Kristy K.
    MEDICAL PHYSICS, 2020, 47 (04) : 1670 - 1679
  • [48] Hybrid semiconductor/nanoelectronic circuits: Freeing advanced lithography from the alignment accuracy burden
    Likharev, Konstantin K.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2007, 25 (06): : 2531 - 2536
  • [49] METHOD TO IMPROVE NORTH FINDER ACCURACY
    PRIEL, B
    SYMPOSIUM : GYRO TECHNOLOGY 1989, 1989, : 31 - 42
  • [50] Study on method to improve the accuracy of holospectrum
    Xiang, C.
    Yang, W.
    Xie, L.-J.
    Ji Xie She Ji Yu Yian Jiu/Machine Design and Research, 2001, 17 (03): : 63 - 64
12345