Silicon selective epitaxial growth and electrical properties of epi/sidewall interfaces

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[1] Ishitani, Akihiko

[2] Kitajima, Hiroshi

[3] Endo, Nobuhiro

[4] Kasai, Naoki

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Ishitani, Akihiko | 1600年 / 28期

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[41] SILICON SELECTIVE EPITAXIAL-GROWTH AT REDUCED PRESSURE AND TEMPERATURE
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[49] ELECTRICAL PROPERTIES OF EPITAXIAL SILICON FILMS ON ALPHA-ALUMINA
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