Control of crystallinity of alkoxy-derived zirconia thin films by UV irradiation

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作者
Nishizawa, Kaori [1 ]
Miki, Takeshi [1 ]
Suzuki, Kazuyuki [1 ]
Fu, Desheng [1 ]
Kato, Kazumi [1 ]
机构
[1] National Institute of AIST, 2266-98 Anagahora, Shimoshidami, Moriyama-ku, Nagoya 463-8560, Japan
关键词
Alkoxy derived zirconia - Crystallinity - Low pressure mercury lamp;
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页码:125 / 128
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