Disordered Si/SiGe superlattices grown by ultrahigh vacuum chemical vapor deposition

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Natl Nano Device Lab, Hsinchu, Taiwan [1 ]
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Appl Surf Sci | / 1-4卷 / 119-123期
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This work was performed at the National Nano Device Laboratory which was supported in part by the National Science Council of Republic of China under contract No. NSC 82-0404-E009-233;
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