Reacted amorphous layers: tantalum and niobium oxides

被引：0

作者：

Thomas, O. ^{[1
]}

d'Heurle, F.M. ^{[1
]}

Charai, A. ^{[1
]}

机构：

[1] IBM Thomas J. Watson Research Cent, United States

来源：

Philosophical Magazine B: Physics of Condensed Matter; Electronic, Optical and Magnetic Properties | 1988年 / 58卷 / 05期

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摘要：

引用

页码：529 / 538

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