ORIENTATION DEPENDENCE OF LATERAL SOLID-PHASE-EPITAXIAL GROWTH IN AMORPHOUS Si FILMS.

被引:0
作者
Yamamoto, Hiroshi [1 ]
Ishiwara, Hiroshi [1 ]
Furukawa, Seijiro [1 ]
机构
[1] Tokyo Inst of Technology, Yokohama, Jpn, Tokyo Inst of Technology, Yokohama, Jpn
来源
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1986年 / 25卷 / 05期
关键词
D O I
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中图分类号
学科分类号
摘要
SEMICONDUCTING SILICON
引用
收藏
页码:667 / 672
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