ORIENTATION DEPENDENCE OF LATERAL SOLID-PHASE-EPITAXIAL GROWTH IN AMORPHOUS Si FILMS.

被引:0
作者
Yamamoto, Hiroshi [1 ]
Ishiwara, Hiroshi [1 ]
Furukawa, Seijiro [1 ]
机构
[1] Tokyo Inst of Technology, Yokohama, Jpn, Tokyo Inst of Technology, Yokohama, Jpn
来源
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1986年 / 25卷 / 05期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
SEMICONDUCTING SILICON
引用
收藏
页码:667 / 672
相关论文
共 50 条
  • [31] Level set modeling of the orientation dependence of solid phase epitaxial regrowth
    Morarka, Saurabh
    Rudawski, N. G.
    Law, Mark E.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 26 (01): : 357 - 361
  • [32] COMPARISON OF CRYSTAL ORIENTATION DEPENDENCE FOR THE SOLID-PHASE EPITAXIAL PROCESS IN ION-IMPLANTED SI AND GAAS
    LICOPPE, C
    NISSIM, YI
    HENOC, P
    APPLIED PHYSICS LETTERS, 1986, 48 (21) : 1441 - 1443
  • [33] Solid Phase Epitaxial Re-growth of Amorphous Layer in Si:Si Annealed under Enhanced Hydrostatic Pressure
    Bak-Misiuk, Jadwiga
    Misiuk, Andrzej
    Barcz, Adam
    Romanowski, Przemyslaw
    GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY XIV, 2011, 178-179 : 416 - +
  • [34] EPITAXIAL-GROWTH OF SOS FILMS WITH AMORPHOUS SI BUFFER LAYER
    ISHIDA, M
    OHYAMA, H
    SASAKI, S
    YASUDA, Y
    NISHINAGA, T
    NAKAMURA, T
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (07) : L541 - L544
  • [35] SOLID-PHASE EPITAXIAL-GROWTH OF GE AND SI THROUGH METAL-FILMS
    LAU, SS
    MAYER, JW
    NICOLET, MA
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (03) : C78 - C78
  • [36] Epitaxial growth and surface instabilities in alloy films.
    Desai, RC
    Huang, ZF
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2002, 223 : U451 - U451
  • [37] LATERAL SOLID-PHASE EPITAXY OF AMORPHOUS SI FILMS SELECTIVELY DOPED WITH P IN THE SURFACE REGION
    DAN, T
    ISHIWARA, H
    FURUKAWA, S
    JOURNAL OF ELECTRONIC MATERIALS, 1988, 17 (04) : S19 - S19
  • [38] Epitaxial Si/Si(001) thin films obtained by solid phase crystallization
    Kim, HJ
    Jeon, SH
    Jeon, TY
    Noh, DY
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2004, 22 (04): : 1188 - 1190
  • [39] THICKNESS DEPENDENCE OF EFFECTIVE COMPOSITION FOR AMORPHOUS TbFe FILMS.
    Nakada, M.
    Toki, K.
    Okada, M.
    1600, (TJMJ-2):
  • [40] CONCENTRATION-DEPENDENCE OF THE SOLID-PHASE EPITAXIAL-GROWTH RATE IN TE IMPLANTED SI
    CAMPISANO, SU
    BARBARINO, AE
    APPLIED PHYSICS, 1981, 25 (02): : 153 - 155