ORIENTATION DEPENDENCE OF LATERAL SOLID-PHASE-EPITAXIAL GROWTH IN AMORPHOUS Si FILMS.

被引：0

作者：

Yamamoto, Hiroshi ^{[1
]}

Ishiwara, Hiroshi ^{[1
]}

Furukawa, Seijiro ^{[1
]}

机构：

[1] Tokyo Inst of Technology, Yokohama, Jpn, Tokyo Inst of Technology, Yokohama, Jpn

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1986年 / 25卷 / 05期

关键词：

D O I：

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中图分类号：

学科分类号：

摘要：

SEMICONDUCTING SILICON

引用

页码：667 / 672

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