Solid state quantum computer development in silicon with single ion implantation
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作者:
Schenkel, T.
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E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720
Schenkel, T.
[1
]
Persaud, A.
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E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720
Persaud, A.
[1
]
Park, S.J.
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E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720
Park, S.J.
[1
]
Nilsson, J.
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E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720
Lawrence Livermore Natl. Laboratory, Livermore, CA 94550E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720
Nilsson, J.
[1
,2
]
Bokor, J.
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E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720
Department of Electrical Engineering, University of California, Berkeley, CA 94720E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720
Bokor, J.
[1
,3
]
Liddle, J.A.
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E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720
Liddle, J.A.
[1
]
Keller, R.
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E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720
Keller, R.
[1
]
Schneider, D.H.
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Lawrence Livermore Natl. Laboratory, Livermore, CA 94550E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720
Schneider, D.H.
[2
]
Cheng, D.W.
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E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720
Cheng, D.W.
[1
]
Humphries, D.E.
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E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720
Humphries, D.E.
[1
]
机构:
[1] E. O. Lawrence Berkeley Natl. Lab., Berkeley, CA 94720
[2] Lawrence Livermore Natl. Laboratory, Livermore, CA 94550
[3] Department of Electrical Engineering, University of California, Berkeley, CA 94720
来源:
Journal of Applied Physics
|
2003年
/
94卷
/
11期
关键词:
Algorithms - Band structure - Data processing - Doping (additives) - Electrons - Ion implantation - Nanotechnology - Nuclear magnetic resonance - Oscillations - Scanning tunneling microscopy - Semiconducting gallium arsenide - Semiconductor quantum dots - Silicon - Tunnel junctions;
D O I:
暂无
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摘要:
The development of scalable quantum computers was discussed. Integration of single 31P atom arrays with readout single electron transistors (SET) and control gates was required for the fabrication of multi quantum bit (qubit) quantum computer test structures in silicon. A single ion implantation technique was described which placed the individual ions into materials with a resolution of 5-10 nm. Single atom devices were formed which provided access to the physics of 31P qubits in silicon by integration with semiconductor processing.