Spectrum analysis of the optical low-coherence reflectometry system

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作者
Huazhong Univ of Science &, Technology, Hubei, China [1 ]
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Guangzi Xuebao | / 2卷 / 136-139期
关键词
Coherent light - High pass filters - Optical testing - Reflectometers - Spectrum analysis - Systems analysis;
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摘要
Optical low-coherence reflectometry (OLCR) has been analyzed theoretically as an imaging system upon the weak object approximation. The signal formation mechanism has been studied. It has been proved that the OLCR system behaves as a linear shift invariance system and performs like a high-pass filter. High spatial frequency structures of the defects are detected directly. This research will provide theoretical basis for analyzing the measuring results of the unknown structure quantitatively and increasing the spatial resolution.
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