APPARATUS FOR INVESTIGATION OF CLUSTERS OF ELECTRICALLY ACTIVE IMPURITIES IN SEMICONDUCTORS BY THE METHOD OF SMALL-ANGLE LIGHT SCATTERING.

被引：0

作者：

Zabolotskii, S.E. ^{[1
]}

Kalinushkin, V.P. ^{[1
]}

Ploppa, M.G. ^{[1
]}

Murina, T.M. ^{[1
]}

机构：

[1] Acad of Sciences of the USSR, Inst, of General Physics, Moscow, USSR, Acad of Sciences of the USSR, Inst of General Physics, Moscow, USSR

来源：

Instruments and experimental techniques New York | 1984年 / 27卷 / 4 pt 2期

关键词：

BLOCK DIAGRAM APPARATUS - ELECTRICALLY ACTIVE IMPURITIES - SMALL-ANGLE SCATTERING - STROBE-INTEGRATOR;

D O I：

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摘要：

引用

页码：1021 / 1024