SCANNING ELECTRON MICROSCOPY STUDIES OF SILICON ON INSULATOR DEVICES.

被引：0

作者：

Drake, Donald J. ^{[1
]}

Fernquist, Richard ^{[1
]}

Hawkins, William G. ^{[1
]}

机构：

[1] Xerox Corp, Webster Research Cent,, Webster, NY, USA, Xerox Corp, Webster Research Cent, Webster, NY, USA

来源：

Scanning Electron Microscopy | 1984年 / pt 4期

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D O I：

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摘要：

引用

页码：1579 / 1584

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