NOVEL TI:LINBO3 RIDGE WAVEGUIDE LINEAR MODE CONFINEMENT MODULATOR FABRICATED BY REACTIVE ION-BEAM ETCHING.

被引：0

作者：

Belanger, Michel ^{[1
]}

Yip, Gar Lam ^{[1
]}

机构：

[1] McGill Univ, Montreal, Que, Can, McGill Univ, Montreal, Que, Can

来源：

Journal of Lightwave Technology | 1987年 / LT-5卷 / 09期

关键词：

PHOTORESISTS; -; WAVEGUIDES; OPTICAL;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The realization of a ridge waveguide linear mode-confinement modulator using reactive ion-beam etching is discussed. With the help of a design analysis, the modulation characteristics are predicted. Along with the measured modulation characteristics, preliminary results of the calibration of ion-beam etching in Z-cut LiNbO//3 by Ar and a mixture of Ar and CHF//3 are presented. Differential etching rates of as high as 7 between photoresist and LiNbO//3 are obtained. Using the proposed design of a ridge waveguide linear modulator, a linear modulation of over 67% is measured.

引用

页码：1252 / 1257

共 28 条

[21] Ridge waveguide Mach-Zender modulators fabricated by a novel nickel-indiffused LiNbO3 self-aligned process
Chang, WC
Sue, CY
Hou, HC
Hsuan, MY
Chang, LY
INTEGRATED OPTICS DEVICES IV, 2000, 3936 : 42 - 49
[22] Fabrication of 0.7 μm2 ridge waveguide in ion-sliced LiNbO3 by proton-exchange accelerated chemical etching
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JAPANESE JOURNAL OF APPLIED PHYSICS, 2015, 54 (12)
[23] Generation of high-confinement step-like optical waveguides in LiNbO3 by swift heavy ion-beam irradiation -: art. no. 183501
Olivares, J
García, G
García-Navarro, A
Agulló-López, F
Caballero, O
García-Cabañes, A
APPLIED PHYSICS LETTERS, 2005, 86 (18) : 1 - 3
[24] NOVEL ALGAAS LASER WITH HIGH-QUALITY MIRROR FABRICATED BY REACTIVE ION-BEAM ETCHING AND INSITU PASSIVATION USING ENCLOSED UHV PROCESSING SYSTEM
UCHIDA, M
KAWANO, H
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IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (11) : 2378 - 2379
[25] OVER 245-MW 1.3-MU-M BURIED RIDGE STRIPE LASER-DIODES ON NORMAL-SUBSTRATE FABRICATED BY THE REACTIVE ION-BEAM ETCHING TECHNIQUE
BOUADMA, N
KAZMIERSKI, C
SEMO, J
APPLIED PHYSICS LETTERS, 1991, 59 (01) : 22 - 24
[26] Secondary-ion-mass spectrometry study on near-stoichiometric LiNbO3 strip waveguide fabricated by vapour transport equilibration and Ti co-diffusion
Zhang, D. -L.
Yang, Z.
Wong, W. H.
Pun, E. Y. B.
PHILOSOPHICAL MAGAZINE, 2007, 87 (01) : 63 - 75
[27] NOVEL ALGAAS LASER WITH HIGH-QUALITY MIRROR FABRICATED BY REACTIVE ION-BEAM ETCHING AND IN-SITU PASSIVATION USING ENCLOSED UHV PROCESSING SYSTEM.
Uchida, M.
Kawano, H.
Asakwa, K.
IEEE Transactions on Electron Devices, 1987, ED-34 (11)
[28] Reconstruction of extraordinary refractive index profile of O2+ ion-implanted LiNbO3 single-mode channel waveguide based on beam propagation method and image processing
Liu, Xiangzhi
Lu, Fei
Chen, Feng
Zhang, Ruifeng
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