NOVEL TI:LINBO3 RIDGE WAVEGUIDE LINEAR MODE CONFINEMENT MODULATOR FABRICATED BY REACTIVE ION-BEAM ETCHING.

被引：0

作者：

Belanger, Michel ^{[1
]}

Yip, Gar Lam ^{[1
]}

机构：

[1] McGill Univ, Montreal, Que, Can, McGill Univ, Montreal, Que, Can

来源：

Journal of Lightwave Technology | 1987年 / LT-5卷 / 09期

关键词：

PHOTORESISTS; -; WAVEGUIDES; OPTICAL;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The realization of a ridge waveguide linear mode-confinement modulator using reactive ion-beam etching is discussed. With the help of a design analysis, the modulation characteristics are predicted. Along with the measured modulation characteristics, preliminary results of the calibration of ion-beam etching in Z-cut LiNbO//3 by Ar and a mixture of Ar and CHF//3 are presented. Differential etching rates of as high as 7 between photoresist and LiNbO//3 are obtained. Using the proposed design of a ridge waveguide linear modulator, a linear modulation of over 67% is measured.

引用

页码：1252 / 1257

共 28 条

[11] BLAZED Si GRATING FOR SOFT X-RAY FABRICATED BY TWO-STAGE REACTIVE ION-BEAM ETCHING.
Aritome, Hiroaki
Yamato, Toshiya
Matsui, Shinji
Namba, Susumu
Japanese Journal of Applied Physics, Part 2: Letters, 1983, 22 (22): : 219 - 220
[12] PLANAR BRAGG-GRATING LENSES IN LINBO3 FABRICATED BY CHF3-REACTIVE-ION-ETCHING
STOCKMANN, M
BEINVOGL, W
WAVE ELECTRONICS, 1983, 4 (04): : 221 - 228
[13] BPM DESIGN OPTIMIZATION AND EXPERIMENTAL IMPROVEMENT OF A TI-LINBO3 RIDGE WAVE-GUIDE LINEAR-MODE CONFINEMENT MODULATOR
SEKERKABAJBUS, MA
YIP, GL
GOTO, N
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1990, 8 (11) : 1742 - 1749
[14] Ni:LiNbO3 ridge waveguide Mach-Zehnder electrooptic modulators fabricated by proton-exchanged wet etching
Chang, Wen-Ching
Journal of Optical Communications, 2000, 21 (02) : 73 - 78
[15] Planar Domain Gratings Fabricated by a Set of Local E-Beam Irradiations on the Y-Cuts of LiNbO3 and in the Planar Waveguide Ti:LiNbO3
Kokhanchik, L. S.
Borodin, M. V.
Burimov, N. I.
Shandarov, S. M.
Shcherbina, V. V.
FERROELECTRICS, 2011, 411 : 71 - 78
[16] Optical Performance of Bragg Gratings Fabricated in Ti:LiNbO3 Waveguides by Focused Ion Beam Milling
Ghoumid, Kamal
Ferriere, Richard
Benkelfat, Badr-Eddine
Guizal, Brahim
Gharbi, Tijani
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2010, 28 (23) : 3488 - 3493
[17] RIDGE WAVE-GUIDES AND ELECTRO-OPTICAL SWITCHES IN LINBO3 FABRICATED BY ION-BOMBARDMENT-ENHANCED ETCHING
KAWABE, M
HIRATA, S
NAMBA, S
IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS, 1979, 26 (12): : 1109 - 1113
[18] Research for measuring the multi-mode cut-off wavelength of LiNbO3 waveguide modulator fabricated by proton exchange
Zhang G.
Chen B.
Fu C.
Sui G.
Wang G.
Guangxue Xuebao/Acta Optica Sinica, 2011, 31 (11): : 1113001 - 1
[19] C2F6 REACTIVE ION-BEAM ETCHING OF LiNbO3 AND Nb2O5 AND THEIR APPLICATION TO OPTICAL WAVEGUIDES.
Zhang, Bei
Forouhar, Siamak
Huang, S.Y.
Chang, William S.C.
Journal of Lightwave Technology, 1984, LT-2 (04) : 528 - 530
[20] C2F6 REACTIVE ION-BEAM ETCHING OF LINBO3 AND NB2O5 AND THEIR APPLICATION TO OPTICAL WAVE-GUIDES
ZHANG, B
FOROUHAR, S
HUANG, SY
CHANG, WSC
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1984, 2 (04) : 528 - 530

← 1 2 3 →