Ion-beam-assisted deposition of magnetron-sputtered metal nitrides

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作者：
Baether, K.-H. [1 ]
Herrmann, U. [1 ]
Schroeer, A. [1 ]
机构：
[1] MAT GmbH Dresden, Dresden, Germany
来源：
| 1600年 / Elsevier Science S.A., Lausanne, Switzerland卷 / 75期
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