Improving performance with oxynitride gate dielectrics

被引：0

作者：

Leonarduzzi, Gianni D. ^{[1
]}

Kwong, Dim-Lee ^{[1
]}

机构：

[1] Scott Speciality Gases Inc, Austin, United States

来源：

Semiconductor International | 1998年 / 21卷 / 08期

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D O I：

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摘要：

引用

页码：225 / 226

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