共 50 条
- [2] LANTHANUM HEXABORIDE CATHODES FOR ELECTRON-BEAM DEVICES. Instruments and experimental techniques New York, 1984, 27 (5 pt 2): : 1205 - 1208
- [4] Development of electron-beam lithography for power semiconductor devices EMERGING LITHOGRAPHIC TECHNOLOGIES, 1997, 3048 : 69 - 75
- [8] Technology of Simultaneous Evaporation with Electron Beam Guns for Metallization of Semiconductor Devices. Elektronika Warszawa, 1982, 23 (09): : 8 - 16
- [10] Development of electron-beam litography strategy for power integral semiconductor devices IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA, 1998, 62 (03): : 622 - 626