Effects of surfactants on the properties of ordered periodic porous silica films

被引：0

作者：

机构：

[1] Yamada, Kazuhiro

[2] Oku, Yoshiaki

[3] Hata, Nobuhiro

[4] Takada, Syozo

[5] 2,Kikkawa, Takamaro

来源：

Yamada, K. | 1840年 / Japan Society of Applied Physics卷 / 42期

关键词：

Ammonium compounds - Crystalline materials - Molecular structure - Permittivity - Porosity - Porous materials - Refractive index - Semiconducting silicon - Silanes - Silica - Spin coating - Surface active agents;

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摘要：

We report the effects of surfactants on the properties of ordered periodic porous silica films. Silica films with a periodically ordered structure were synthesized on crystalline silicon substrates by spin-coating an alkoxysilane solution mixed with a self-assembling template and a cationic alkyltrimethylammonium chloride (ATMACl, CH3(CH2)n-1N(CH3)3 Cl) surfactant, where n was 12, 14 or 16. The effects of surfactants on the properties of porous silica films with a periodic pore structure were investigated. Both dielectric constant and refractive index decreased with the length of alkylchain in the template molecule ATMACl. The pore structure was successfully controlled by the alkylchain length of the template molecule when the tetraethyl-orthosilicate (TEOS) vapor treatment was applied.

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