Effects of surfactants on the properties of ordered periodic porous silica films

被引：0
|
作者：
机构：
[1] Yamada, Kazuhiro
[2] Oku, Yoshiaki
[3] Hata, Nobuhiro
[4] Takada, Syozo
[5] 2,Kikkawa, Takamaro
来源：
Yamada, K. | 1840年 / Japan Society of Applied Physics卷 / 42期
关键词：
Ammonium compounds - Crystalline materials - Molecular structure - Permittivity - Porosity - Porous materials - Refractive index - Semiconducting silicon - Silanes - Silica - Spin coating - Surface active agents;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We report the effects of surfactants on the properties of ordered periodic porous silica films. Silica films with a periodically ordered structure were synthesized on crystalline silicon substrates by spin-coating an alkoxysilane solution mixed with a self-assembling template and a cationic alkyltrimethylammonium chloride (ATMACl, CH3(CH2)n-1N(CH3)3 Cl) surfactant, where n was 12, 14 or 16. The effects of surfactants on the properties of porous silica films with a periodic pore structure were investigated. Both dielectric constant and refractive index decreased with the length of alkylchain in the template molecule ATMACl. The pore structure was successfully controlled by the alkylchain length of the template molecule when the tetraethyl-orthosilicate (TEOS) vapor treatment was applied.
引用
收藏
相关论文
共 50 条
  • [31] Structure and Optical Properties of Ordered Mesoporous Titania-Silica Composite Thin Films
    Wang, Zhongying
    Wang, Peiyu
    Li, Jiangong
    Lu, Qingshan
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2009, 9 (04) : 2574 - 2581
  • [32] Structure and optical properties of ordered mesoporous copper oxide-silica composite films
    Wang, Zhongying
    Lu, Qingshan
    Wang, Peiyu
    Li, Jiangong
    JOURNAL OF EXPERIMENTAL NANOSCIENCE, 2011, 6 (05) : 528 - 538
  • [33] Roughness and pore structure control of ordered mesoporous silica films for the enhancement of electrical properties
    Jung, Sang-Bae
    Ha, Tae-Jung
    Park, Hyung-Ho
    JOURNAL OF APPLIED PHYSICS, 2007, 101 (02)
  • [34] Effects of the functional groups on the electrochemical properties of ordered porous carbon for supercapacitors
    Fan, Li-Zhen
    Qiao, Suyan
    Song, Weili
    Wu, Mao
    He, Xinbo
    Qu, Xuanhui
    ELECTROCHIMICA ACTA, 2013, 105 : 299 - 304
  • [35] Effects of the Starting Powders on Microstructure and Properties of Porous Silica Ceramics
    Zhou Lizhong
    Wang Chang-An
    Huang Yong
    HIGH-PERFORMANCE CERAMICS VI, 2010, 434-435 : 674 - 677
  • [36] Ordered porous thin films in electrochemical analysis
    Walcarius, Alain
    Kuhn, Alexander
    TRAC-TRENDS IN ANALYTICAL CHEMISTRY, 2008, 27 (07) : 593 - 603
  • [37] Tuning the Properties of Periodic Mesoporous Organosilica Films for Low-k Application by Gemini Surfactants
    Redzheb, Murad
    Okudur, Oguzhan Orkut
    Bernstorff, Sigrid
    Juraic, Krunoslav
    Van der Voort, Pascal
    Armini, Silvia
    CHEMPHYSCHEM, 2018, 19 (18) : 2295 - 2298
  • [38] Effect of experimental conditions on the structure and properties of nano-porous silica films
    Wu, GM
    Wang, J
    Shen, J
    Yang, TH
    Zhang, QY
    Zhou, B
    Deng, ZS
    Fan, B
    Zhou, DP
    Zhang, FS
    ACTA PHYSICA SINICA, 2001, 50 (01) : 175 - 181
  • [39] The effect of TEOS/MTES ratio on the structural and dielectric properties of porous silica films
    Yu, SZ
    Wong, TKS
    Hu, X
    Pita, K
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2003, 150 (05) : F116 - F121
  • [40] Influence of CMP chemicals on the properties of porous silica low-k films
    Ishikawa, A.
    Shishida, Y.
    Yamanishi, T.
    Hata, N.
    Nakayama, T.
    Fujii, N.
    Tanaka, H.
    Matsuo, H.
    Kinoshita, K.
    Kikkawa, T.
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2006, 153 (07) : G692 - G696
12345