Experimental measurement of the impressed electric field in a multipolar electron cyclotron resonance plasma source

被引：0
作者：
机构：
来源：
IEEE Int Conf Plasma Sci | / 131期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
[41]   First plasma of the A-PHOENIX electron cyclotron resonance on source [J].
Thuillier, T. ;
Lamy, T. ;
Latrasse, L. ;
Angot, J. .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2008, 79 (02)
[42]   Enhanced confinement in electron cyclotron resonance ion source plasma [J].
Schachter, L. ;
Stiebing, K. E. ;
Dobrescu, S. .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2010, 81 (02)
[43]   CHARACTERISTICS OF A MICROWAVE ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE [J].
CAMPS, E ;
OLEA, O ;
GUTIERREZTAPIA, C ;
VILLAGRAN, M .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (05) :3219-3227
[44]   DISCHARGE CHARACTERISTICS OF A 5 CM MULTIPOLAR ELECTRON-CYCLOTRON-RESONANCE ION-SOURCE [J].
SRIVASTAVA, AK ;
SZE, FC ;
ASMUSSEN, J .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (05) :1749-1752
[45]   Long electron cyclotron resonance plasma source for reactive sputtering [J].
Yasui, T ;
Nakase, K ;
Tahara, H ;
Yoshikawa, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (10) :5495-5500
[46]   Electron cyclotron resonance plasma ion source for material depositions [J].
Delaunay, M ;
Touchais, E .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (06) :2320-2324
[47]   Long electron cyclotron resonance plasma source for reactive sputtering [J].
Yasui, Toshiaki ;
Nakase, Kiyotaka ;
Tahara, Hirokazu ;
Yoshikawa, Takao .
1996, JJAP, Minato-ku, Japan (35)
[48]   Development and studies on a compact electron cyclotron resonance plasma source [J].
Ganguli, A. ;
Tarey, R. D. ;
Arora, N. ;
Narayanan, R. .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2016, 25 (02)
[49]   Numerical simulation of the plasma of an electron cyclotron resonance ion source [J].
Girard, A ;
Lécot, C ;
Serebrennikov, K .
JOURNAL OF COMPUTATIONAL PHYSICS, 2003, 191 (01) :228-248
[50]   A Plasma Source Based on Microwave Discharge with Electron Cyclotron Resonance [J].
Instrum Exp Tech, (97)
12345