共 50 条
[32]
Unstable plasma characteristics in mirror field electron cyclotron resonance microwave ion source
[J].
Pramana,
2000, 54
:763-769
[33]
Unstable plasma characteristics in mirror field electron cyclotron resonance microwave ion source
[J].
PRAMANA-JOURNAL OF PHYSICS,
2000, 54 (05)
:763-769
[36]
PLASMA PARAMETER AND ETCH MEASUREMENTS IN A MULTIPOLAR CONFINED ELECTRON-CYCLOTRON RESONANCE DISCHARGE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1991, 9 (01)
:29-33
[39]
Measurement of a three-dimensional distribution of microwave electric field in electron cyclotron resonance plasmas
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1997, 36 (7B)
:4617-4619