Experimental measurement of the impressed electric field in a multipolar electron cyclotron resonance plasma source

被引:0
作者
机构
来源
IEEE Int Conf Plasma Sci | / 131期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
[31]   Experimental studies on a compact electron cyclotron resonance plasma x-ray source [J].
Baskaran, R ;
Selvakumaran, TS .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (06) :2637-2645
[32]   Unstable plasma characteristics in mirror field electron cyclotron resonance microwave ion source [J].
S K Angra ;
Parshant Kumar ;
R R Dongaonkar ;
R P Bajpai .
Pramana, 2000, 54 :763-769
[33]   Unstable plasma characteristics in mirror field electron cyclotron resonance microwave ion source [J].
Angra, SK ;
Kumar, P ;
Dongaonkar, RR ;
Bajpai, RP .
PRAMANA-JOURNAL OF PHYSICS, 2000, 54 (05) :763-769
[34]   Electron cyclotron resonance light source assembly -: A vacuum-ultraviolet radiation source based on an electron cyclotron resonance plasma [J].
Grübling, P ;
Hollandt, J ;
Ulm, G .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (02) :1200-1202
[35]   MICROWAVE EXCITATION OF LARGE VOLUMES OF PLASMA AT ELECTRON-CYCLOTRON RESONANCE IN MULTIPOLAR CONFINEMENT [J].
POMATHIOD, L ;
DEBRIE, R ;
ARNAL, Y ;
PELLETIER, J .
PHYSICS LETTERS A, 1984, 106 (07) :301-304
[36]   PLASMA PARAMETER AND ETCH MEASUREMENTS IN A MULTIPOLAR CONFINED ELECTRON-CYCLOTRON RESONANCE DISCHARGE [J].
MANTEI, TD ;
RYLE, TE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (01) :29-33
[37]   Influence of the multipolar magnetic field configuration on the density of distributed electron cyclotron resonance plasmas [J].
Lagarde, T ;
Pelletier, J ;
Arnal, Y .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1997, 6 (01) :53-60
[38]   Plasma potential measurement in 2.45 GHz electron cyclotron resonance plasma with a magnetron magnetic field configuration [J].
Kim, Seong Bong ;
Namkung, Won ;
Cho, Moohyun ;
Kim, Dae Chul ;
Yoo, Suk Jae .
THIN SOLID FILMS, 2010, 518 (22) :6690-6693
[39]   Measurement of a three-dimensional distribution of microwave electric field in electron cyclotron resonance plasmas [J].
Furuse, M ;
Tamura, H ;
Watanabe, S ;
Fukumasa, O .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (7B) :4617-4619
[40]   A plasma source based on microwave discharge with electron cyclotron resonance [J].
Andreev, YA ;
Zakharov, AN ;
Klimov, AI ;
Koshelev, VI ;
Petkun, AA ;
Sochugov, NS ;
Sukhushin, KN .
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1997, 40 (01) :97-99