Experimental measurement of the impressed electric field in a multipolar electron cyclotron resonance plasma source

被引:0
作者
机构
来源
IEEE Int Conf Plasma Sci | / 131期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [21] Theoretical and experimental study of the electron distribution function in the plasma of an electron cyclotron resonance ion source
    Girard, A
    Perret, C
    Lecot, C
    Bourg, F
    Khodja, H
    Melin, G
    ICPP 96 CONTRIBUTED PAPERS - PROCEEDINGS OF THE 1996 INTERNATIONAL CONFERENCE ON PLASMA PHYSICS, VOLS 1 AND 2, 1997, : 462 - 465
  • [22] Lifetime measurement of metastable fluorine atoms using electron cyclotron resonance plasma source
    Shimizu, Masao
    Ohmi, Hiromasa
    Kakiuchi, Hiroaki
    Yasutake, Kiyoshi
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2006, 24 (06): : 2133 - 2138
  • [23] Numerical simulation of an electron cyclotron resonance plasma source
    Liu, Minghai
    Hu, Xiwei
    Wu, Qinchong
    Yu, Guoyang
    Wuli Xuebao/Acta Physica Sinica, 2000, 49 (03): : 497 - 501
  • [24] AN ELECTRON-CYCLOTRON RESONANCE (ECR) PLASMA SOURCE
    KRETSCHMER, KH
    MATL, K
    LORENZ, G
    KESSLER, I
    DUMBACHER, B
    SOLID STATE TECHNOLOGY, 1990, 33 (02) : 53 - 55
  • [25] A compact coaxial electron cyclotron resonance plasma source
    Baskaran, R
    Jain, SK
    Ramamurthy, SS
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (03) : 1243 - 1245
  • [26] SELECTIVE ETCHING OF BILAYER PHOTORESIST USING A MULTIPOLAR ELECTRON-CYCLOTRON RESONANCE SOURCE
    SUNG, KT
    PANG, SW
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (12) : 3599 - 3602
  • [27] Numerical simulation of an electron cyclotron resonance plasma source
    Liu, MH
    Hu, XW
    Wu, QC
    Yu, GY
    ACTA PHYSICA SINICA, 2000, 49 (03) : 497 - 501
  • [28] SURFACE DAMAGE ON GAAS ETCHED USING A MULTIPOLAR ELECTRON-CYCLOTRON-RESONANCE SOURCE
    KO, KK
    PANG, SW
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1994, 141 (01) : 255 - 258
  • [29] Experimental investigation of plasma instabilities by Fourier analysis in an electron cyclotron resonance ion source
    Kumar, Sarvesh
    Sharma, Jyotsna
    Sharma, Prashant
    Sharma, Shatendra
    Mathur, Yaduvansh
    Sharma, Devendra
    Kashyap, Manish K.
    PHYSICAL REVIEW ACCELERATORS AND BEAMS, 2018, 21 (09):
  • [30] Experimental studies on a compact electron cyclotron resonance plasma x-ray source
    Baskaran, R.
    Selvakumaran, T.S.
    Review of Scientific Instruments, 70 (06):