Effects of Tl impurities on the properties of amorphous SiC:H films prepared by co-sputtering

被引：0
|
作者：
Saito, N. [1 ]
Inui, Y. [1 ]
Yamaguchi, T. [1 ]
Nakaaki, I. [1 ]
机构：
[1] Takamatsu Natl Coll of Technology, Takamatsu, Japan
来源：
Thin Solid Films | 1996年 / 281-282卷 / 1-2期
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摘要：
6
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页码：302 / 304
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