An Investigation on the 3D Micromachining Techniques based on a SPM

被引：0
作者：
Yan, Y.D. [1 ]
Sun, T. [1 ]
Dong, S. [1 ]
Liang, Y.C. [1 ]
Cheng, K. [1 ]
机构：
[1] Harbin Institute of Technology, PO Box 413, Harbin 150001, China
来源：
Key Engineering Materials | 2004年 / 257-258卷
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D O I：
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学科分类号：
摘要：
10
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页码：465 / 470
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