Fabrication of Josephson junction on (001) YBa2Cu3Ox single crystal substrate

被引:0
作者
Konishi, M. [1 ]
Enomoto, Y. [1 ]
机构
[1] Superconductivity Research Lab, Tokyo, Japan
来源
Japanese Journal of Applied Physics, Part 2: Letters | 1995年 / 34卷 / 10 A期
关键词
Barium compounds - Crystal orientation - Etching - Fabrication - Gold - Josephson junction devices - Oxide superconductors - Photolithography - Photoresists - Single crystals - Substrates - Yttrium compounds;
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摘要
We have fabricated a junction consisting of an α-axis oriented film and a (001) substrate of YBa2Cu3Ox. First, a multi-layer structure has been prepared by film deposition at rather low substrate temperature, and the junction with an area of 40×40 μm2 has been fabricated by conventional photolithography and etching technique. This junction exhibits supercurrent below 65 K and Shapiro-steps under microwave irradiation at 5 GHz. This Josephson junction is the first one formed on the high-Tc single crystal substrate, which has high possibility of improvement in reproducibility due to the high quality electrodes.
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