Fabrication and characterization of different types of two-dimensional AlGaAs photonic crystal slabs

被引：0
|
作者：
Sugimoto, Yoshimasa [1 ]
Ikeda, Naoki [1 ]
Carlsson, Niclas [1 ]
Asakawa, Kiyoshi [1 ]
Kawai, Noriko [2 ]
Inoue, Kuon [2 ]
机构：
[1] Femtosecond Technology Research Association, 5-5 Tokodai, Tsukuba 300-2635, Japan
[2] Research Institute for Electronic Science, Hokkaido University, Sapporo 060-0812, Japan
来源：
Journal of Applied Physics | 2002年 / 91卷 / 03期
关键词：
Aluminum alloys - Light transmission - Aluminum gallium arsenide - Energy gap - Semiconducting indium gallium arsenide - Aspect ratio - Fabrication - Electron beam lithography - Finite difference time domain method - Optical properties - Photonic band gap - Semiconductor alloys;
D O I：
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学科分类号：
摘要：
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页码：922 / 929
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