Low-temperature growth and measurement of oxygen in reactively sputtered AlN thin films

被引：0
|
作者：
Kumar, Sunil [1 ]
Tansley, T.L. [1 ]
机构：
[1] Macquarie Univ, Sydney
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1995年 / 34卷 / 8 A期
关键词：
Aluminum compounds - Film growth - Low temperature operations - Microstructure - Nitrides - Oxygen - Rutherford backscattering spectroscopy - Scanning electron microscopy - Sputter deposition - Stoichiometry - Substrates - X ray photoelectron spectroscopy;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：4154 / 4158
相关论文
共 50 条
  • [21] EFFECT OF OXYGEN ON TEMPERATURE DEPENDENCE OF ELECTRICAL PROPERTIES OF REACTIVELY SPUTTERED TANTALUM FILMS
    WATERHOUSE, N
    WESTWOOD, WD
    CANADIAN JOURNAL OF PHYSICS, 1971, 49 (17) : 2250 - +
  • [22] High temperature strain gages based on reactively sputtered AlNx thin films
    Gregory, OJ
    Slot, AB
    Amons, PS
    Crisman, EE
    SURFACE & COATINGS TECHNOLOGY, 1997, 88 (1-3): : 79 - 89
  • [23] Temperature dependence of resistance in reactively sputtered RuO2 thin films
    Tong, KY
    Jelenkovic, V
    Cheung, WY
    Wong, SP
    JOURNAL OF MATERIALS SCIENCE LETTERS, 2001, 20 (08) : 699 - 700
  • [24] Role of oxygen contaminant on the physical properties of sputtered AlN thin films
    Signore, M. A.
    Taurino, A.
    Valerini, D.
    Rizzo, A.
    Farella, I.
    Catalano, M.
    Quaranta, F.
    Siciliano, P.
    JOURNAL OF ALLOYS AND COMPOUNDS, 2015, 649 : 1267 - 1272
  • [25] Role of oxygen contaminant on the physical properties of sputtered AlN thin films
    Taurino, A. (antonietta.taurino@le.imm.cnr.it), 1600, Elsevier Ltd (649):
  • [26] Anomalous low-temperature magnetoresistance dips in sputtered ferromagnetic thin films and multilayers
    Allia, Paolo
    Celegato, Federica
    Coisson, Marco
    Tiberto, Paola
    Vinai, Franco
    Albertini, Franca
    Casoli, Francesca
    JOURNAL OF APPLIED PHYSICS, 2008, 103 (07)
  • [27] Anomalous low-temperature magnetoresistance dips in sputtered ferromagnetic thin films and multilayers
    Allia, Paolo
    Celegato, Federica
    Cosson, Marco
    Tiberto, Paola
    Vinai, Franco
    Albertini, Franca
    Casoli, Francesca
    Journal of Applied Physics, 2008, 103 (07):
  • [28] DIFFERENT MORPHOLOGIES OF ALN THIN-FILMS SYNTHESIZED AT LOW-TEMPERATURE BY PECVD
    DURAND, J
    AZEMA, N
    CROS, B
    COT, L
    JOURNAL DE PHYSIQUE III, 1993, 3 (04): : 713 - 727
  • [29] GROWTH AND PROPERTIES OF RADIOFREQUENCY REACTIVELY SPUTTERED TITANIUM NITRIDE THIN-FILMS
    KUMAR, N
    POURREZAEI, K
    FISSEL, M
    BEGLEY, T
    LEE, B
    DOUGLAS, EC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1778 - 1782
  • [30] REACTIVELY SPUTTERED THIN FILMS IN VANADIUM-OXYGEN SYSTEM USING TRIODE SPUTTERING
    HENSLER, DH
    ROSS, AR
    FULS, EN
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (06) : 887 - +
12345