Optical characterization of surface roughness of diamond by spectroscopic ellipsometry

被引：0
|
作者：
机构：
[1] Kumagai, N.
[2] Yamasaki, S.
[3] Okushi, H.
来源：
Kumagai, N. (nkumagai@iis.u-tokyo.ac.jp) | / Elsevier Ltd期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Optical characterization of surface roughness of diamond by spectroscopic ellipsometry
    Kumagai, N
    Yamasaki, S
    Okushi, H
    DIAMOND AND RELATED MATERIALS, 2004, 13 (11-12) : 2092 - 2095
  • [2] Application of Spectroscopic Ellipsometry and Mueller Ellipsometry to Optical Characterization
    Garcia-Caurel, Enric
    De Martino, Antonellc
    Gaston, Jean-Paul
    Yan, Li
    APPLIED SPECTROSCOPY, 2013, 67 (01) : 1 - 21
  • [3] Characterization of interfacial layers and surface roughness using spectroscopic reflectance, spectroscopic ellipsometry and atomic force microscopy
    Hoobler, RJ
    Korlahalli, R
    Boltich, E
    Serafin, J
    METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XVI, PTS 1 & 2, 2002, 4689 : 756 - 764
  • [4] SURFACE CHARACTERIZATION BY SPECTROSCOPIC INFRARED ELLIPSOMETRY
    ROSELER, A
    FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY, 1993, 346 (1-3): : 358 - 361
  • [5] Optical parameters of Diamond Films Determined by Spectroscopic Ellipsometry Method
    Pan, Xiaoyu
    Wang, Linjun
    Huang, Jian
    Tang, Ke
    Bi, Mei
    Shi, Weimin
    Xia, Yiben
    RENEWABLE AND SUSTAINABLE ENERGY, PTS 1-7, 2012, 347-353 : 3468 - 3471
  • [6] Optical characterization of nanoporous GaN by spectroscopic ellipsometry
    Lee, Jeong-Hae
    Lee, Baro
    Kang, Jin-Ho
    Lee, June Key
    Ryu, Sang-Wan
    THIN SOLID FILMS, 2012, 525 : 84 - 87
  • [7] Spectroscopic ellipsometry characterization of multilayer optical coatings
    Hilfiker, James N.
    Pribil, Greg K.
    Synowicki, Ron
    Martin, Andrew C.
    Hale, Jeffrey S.
    SURFACE & COATINGS TECHNOLOGY, 2019, 357 : 114 - 121
  • [8] Investigation of the surface micro-roughness of fluoride films by spectroscopic ellipsometry
    Tikhonravov, AV
    Trubetskov, MK
    Krasilnikova, AV
    Masetti, E
    Duparré, A
    Quesnel, E
    Ristau, D
    THIN SOLID FILMS, 2001, 397 (1-2) : 229 - 237
  • [9] REAL-TIME AND SPECTROSCOPIC ELLIPSOMETRY CHARACTERIZATION OF DIAMOND AND DIAMOND-LIKE CARBON
    COLLINS, RW
    CONG, Y
    KIM, YT
    VEDAM, K
    LIOU, Y
    INSPEKTOR, A
    MESSIER, R
    THIN SOLID FILMS, 1989, 181 : 565 - 578
  • [10] Study on optical properties of diamond films by means of infrared spectroscopic ellipsometry
    Shen, HJ
    Wang, LJ
    Fang, ZJ
    Zhang, ML
    Yang, Y
    Wang, L
    Xia, YB
    ACTA PHYSICA SINICA, 2004, 53 (06) : 2009 - 2013
12345