HOLOGRAPHIC WAFER INSPECTION SYSTEM.

被引：0

作者：

Anon

机构：

来源：

关键词：

DEFECT DETECTION - PATTERNED PRODUCT WAFERS - SPATIAL FILTERING - SUBMICRON DEFECTS - WAFER INSPECTION;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：85 / 86

共 50 条

[1] Scanning holographic scatterometer for wafer surface inspection
Klooster, A
Marks, J
Hanson, K
Sawatari, T
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XVIII, PTS 1 AND 2, 2004, 5375 : 1314 - 1324
[2] WAFER BOAT TRANSPORT SYSTEM.
Anon
IBM technical disclosure bulletin, 1985, 27 (12): : 7259 - 7260
[3] Wafer bump inspection system
Anon
Semiconductor International, 2001, 24 (06)
[4] LASERS IN SEMICONDUCTOR PROCESSING - HOLOGRAPHIC WAFER INSPECTION GOES ONLINE
FORREST, GT
LASER FOCUS-ELECTRO-OPTICS, 1987, 23 (10): : 24 - 24
[5] Chidi holographic video system.
Nwodoh, TA
Benton, SA
PRACTICAL HOLOGRAPHY XIV AND HOLOGRAPHIC MATERIALS VI, 2000, 3956 : 167 - 176
[6] GLASS QUALITY INSPECTION SYSTEM.
Lynch, Steve
Speech Technology, 1984, 2 (02): : 69 - 72
[7] AUTOMATED FISH INSPECTION SYSTEM.
Anon
Robotics engineering, 1986, 8 (06):
[8] AUTOMATIC MASK/WAFER ALIGNMENT SYSTEM.
Anon
IBM technical disclosure bulletin, 1985, 28 (04): : 1474 - 1479
[9] Wafer inspection review support system
Anon
Hitachi Review, 2002, (SPEC):
[10] A HOLOGRAPHIC PHOTOMASK DEFECT INSPECTION SYSTEM
LIN, LH
CAVAN, DL
HOWE, RB
GRAVES, RE
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 538 : 110 - 116