Probe diagnostics in a full wave resonator radio-frequency discharge

被引：0
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作者：
Vinogradov, G.K. [1 ]
Menagarishvili, V.M. [1 ]
Yoneyama, S. [1 ]
机构：
[1] MC Electronics Co., Ltd., 907-8, Shimoimasuwa, Shirane-cho, Nakakomagun, 400-02 Yamanashi, Japan
来源：
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1998年 / 16卷 / 03期
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页码：1444 / 1448
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