Nucleation mechanism of concave structure on substrate surface in diamond growth by low pressure vapor deposition

被引：0
|
作者：
Yang, Guowei [1 ]
机构：
[1] No.014 Cent, Ministry of Aviation, and Astronautics, Luoyang, China
来源：
Weixi Jiagong Jishu/Microfabrication Technology | 1993年 / 03期
关键词：
Diamond nucleation mechanism - Low pressure vapor deposition;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
(Edited Abstract)
引用
收藏
页码：83 / 87
相关论文
共 50 条
  • [21] X-ray photoelectron spectroscopy investigation of substrate surface pretreatments for diamond nucleation by microwave plasma chemical vapor deposition
    Chiang, MJ
    Hon, MH
    JOURNAL OF CRYSTAL GROWTH, 2000, 211 (1-4) : 211 - 215
  • [22] Diamond nucleation suppression in chemical vapor deposition process
    Fritzen, CL
    Balzaretti, NM
    Livi, RP
    de Souza, JP
    da Jornada, JAH
    DIAMOND AND RELATED MATERIALS, 1999, 8 (12) : 2110 - 2117
  • [23] Very low pressure nucleation of diamond on mirror-smooth silicon in hot filament chemical vapor deposition system
    Lin, ZD
    Chen, Y
    Chen, QJ
    Lee, ST
    Lam, YW
    CHINESE PHYSICS LETTERS, 1996, 13 (10): : 753 - 756
  • [24] Nucleation and growth of diamond films on aluminum nitride by hot filament chemical vapor deposition
    Wang, WL
    Zhang, RQ
    Liao, KJ
    Sun, YW
    Wang, BB
    DIAMOND AND RELATED MATERIALS, 2000, 9 (9-10) : 1660 - 1663
  • [25] Synthesis and growth mechanism of flattened diamond crystals by chemical vapor deposition
    Hirabayashi, K
    Hirose, Y
    DIAMOND AND RELATED MATERIALS, 1996, 5 (01) : 48 - 52
  • [26] Revealing the growth mechanism of SiV centers in chemical vapor deposition of diamond
    Guo, Yu
    Feng, Yexin
    Zhang, Lixin
    DIAMOND AND RELATED MATERIALS, 2016, 61 : 91 - 96
  • [27] ON THE NUCLEATION PROCESSES DURING VAPOR GROWTH OF DIAMOND
    MATSUMOTO, S
    CARBON, 1990, 28 (06) : 752 - 753
  • [28] Effects of the oxide layer with different thicknesses on copper substrate on depressing graphene nucleation by low pressure chemical vapor deposition
    Shi, Yonggui
    Wang, Yunwei
    Ren, Yang
    Sang, Zhaojun
    JOURNAL OF CRYSTAL GROWTH, 2020, 541 (541)
  • [29] Driving force for diamond growth in low pressure vapor phase
    Zhang, Wei
    Wan, Yongzhong
    Liu, Zhijie
    Wang, Jitao
    Jinshu Xuebao/Acta Metallurgica Sinica, 1997, 33 (11): : 1192 - 1193
  • [30] Mechanism of diamond nucleation enhancement by electron emission via hot filament chemical vapor deposition
    Chongqing Univ, Chongqing, China
    Diamond Relat Mater, 2 (123-126):
12345