Nucleation mechanism of concave structure on substrate surface in diamond growth by low pressure vapor deposition

被引：0
|
作者：
Yang, Guowei [1 ]
机构：
[1] No.014 Cent, Ministry of Aviation, and Astronautics, Luoyang, China
来源：
Weixi Jiagong Jishu/Microfabrication Technology | 1993年 / 03期
关键词：
Diamond nucleation mechanism - Low pressure vapor deposition;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
(Edited Abstract)
引用
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页码：83 / 87
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