Process Control by Parameter Measurements of LSI Wafers.

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作者：
Vernon, N.B.
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来源：
Elektronik Produktion & Prueftechnik | 1981年 / 11期
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摘要：
A new generation of parameter testing equipment is reported that features speed and accuracy. The inherent software and computer performance of these systems contribute to the production of invariably high-quality devices. The program wing, using the programming language PASCAL, is simple because it is easily readable, can be simply written, and is self-documentable. An example for parameter testing concerned with the measurement of resistance is illustrated.
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页码：626 / 629
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