Characterization of TiN and carbon-doped chromium thin film coatings by acoustic microscopy

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作者
Robert, L. [1 ]
Brunet, N. [1 ]
Flaherty, T. [1 ]
Randles, T. [1 ]
Matthaei-Schulz, E. [1 ]
Vetters, H. [1 ]
Rats, D. [1 ]
von Stebut, J. [1 ]
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[1] Universite de Montpellier, Montpellier, France
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页码:327 / 334
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