New approach to low-temperature epitaxial growth of GaAs by photostimulated metalorganic chemical vapor deposition

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作者：
Kachi, Tetsu [1 ]
Ito, Hiroshi [1 ]
Terada, Shigeo [1 ]
机构：
[1] Toyota Central Research &, Development Lab Inc, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 1988年 / 27卷 / 08期
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