X-ray photoelectron spectroscopy of fluorocarbon films deposited by RF sputtering

被引：0
|
作者：
Yamada, Yoshinori [1 ]
Kurobe, Toshiji [1 ]
机构：
[1] Kanazawa Univ, Kanazawa, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1993年 / 32卷 / 11 A期
关键词：
18;
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页码：5090 / 5094
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