Structure and properties of PZT thick films prepared by a modified sol-gel process

被引:0
|
作者
Zhou, Qifa [1 ,2 ]
Zhang, Qingqi [1 ,2 ]
Chan, Helen Lai Wah [2 ]
Choy, Chung Loong [2 ]
机构
[1] Zhongshan University, Guangzhou 510275, China
[2] Department of Applied Physics and Materials Research Centre, Hong Kong Polytechnic University, Hunghom, Kowloon, Hong Kong
关键词
Lead zirconate titanate - Mixtures - Ferroelectric ceramics - Ferroelectric films - Ferroelectricity - Composite films - X ray diffraction - Sol-gel process - Film preparation;
D O I
10.1080/00150190108016022
中图分类号
学科分类号
摘要
Nanosized lead zirconate titanate (PZT) powder prepared by a sol-gel process has been dispersed in a PZT sol-gel solution by ultrasonic agitation to form a stable mixture. The mixture was spin-coated onto stainless steel substrates to form composite films which were then annealed at various temperatures. The crystallization of the composite films was studied by X-ray diffraction. The microstructures, dielectric permittivities and ferroelectric properties of the PZT films were investigated. It was found that the PZT thick films annealed at 600 °C have good ferroelectric properties. © 2001 Taylor & Francis.
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页码:231 / 236
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