Comparison of Auger electron spectroscopy and electron energy loss spectroscopy for phase analysis of thin film oxide systems in ion profiling

被引：0
|
作者：
Beshenkov, V.G. [1 ]
Volkov, V.T. [1 ]
Znamenskii, A.G. [1 ]
Marchenko, V.A. [1 ]
机构：
[1] IPTMEPM, Russian Academy of Sciences, Chernogolovka, Russia
来源：
| 2001年 / Gordon and Breach Science Publishers Inc.卷 / 16期
关键词：
Ion profiling;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] Auger electron spectroscopy analysis of oxidation states of Te in amorphous CdTe oxide thin films
    ZapataNavarro, A
    BartoloPerez, P
    ZapataTorres, M
    CastroRodriguez, R
    Pena, JL
    Farias, MH
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (05): : 2537 - 2541
  • [42] Auger electron spectroscopy analysis of oxidation states of Te in amorphous CdTe oxide thin films
    Zapata-Navarro, A.
    Bartolo-Perez, P.
    Zapata-Torres, M.
    Castro-Rodriguez, R.
    Pena, J.L.
    Farias, M.H.
    Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1997, 15 (05):
  • [43] Electron energy-loss spectroscopy of inhomogeneous systems
    Iowa State Univ, Ames, United States
    Phys A Stat Theor Phys, 1-2 (29-44):
  • [44] Electron energy-loss spectroscopy of inhomogeneous systems
    Fuchs, R
    Mendoza, CI
    Barrera, RG
    Carrillo, JL
    PHYSICA A-STATISTICAL MECHANICS AND ITS APPLICATIONS, 1997, 241 (1-2) : 29 - 44
  • [45] ELECTRON-ENERGY-LOSS SPECTROSCOPY OF LAYERED SYSTEMS
    KRESIN, VZ
    MORAWITZ, H
    PHYSICAL REVIEW B, 1991, 43 (04): : 2691 - 2695
  • [46] Electronic transitions and resonance electron scattering measured by electron energy loss spectroscopy of lead phthalocyanine thin film
    Salomon, E
    Papageorgiou, N
    Ferro, Y
    Layet, JM
    THIN SOLID FILMS, 2004, 466 (1-2) : 259 - 264
  • [47] OPTIMIZATION OF AUGER ELECTRON SPECTROSCOPY IN LEED SYSTEMS
    PALMBERG, PW
    APPLIED PHYSICS LETTERS, 1968, 13 (05) : 183 - &
  • [48] Investigation of Surfaces by Ion Scattering Spectroscopy and Auger Electron Spectroscopy.
    Hauser, H.J.
    Seiler, H.
    Optik (Jena), 1987, 77 (02): : 75 - 79
  • [49] SURFACE-ANALYSIS OF SILVER-HALIDES BY AUGER AND ELECTRON-ENERGY LOSS SPECTROSCOPY
    SAIJO, H
    TANAKA, T
    PHOTOGRAPHIC SCIENCE AND ENGINEERING, 1982, 26 (03): : 133 - 136
  • [50] STOICHIOMETRY AND THICKNESS OF THE INITIAL OXIDE FORMED ON CLEAN TITANIUM SURFACES DETERMINED BY QUANTITATIVE AUGER-ELECTRON SPECTROSCOPY, ELECTRON-ENERGY LOSS SPECTROSCOPY, AND MICROGRAVIMETRY
    BURRELL, MC
    ARMSTRONG, NR
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (04): : 1831 - 1836
12345