Comparison of Auger electron spectroscopy and electron energy loss spectroscopy for phase analysis of thin film oxide systems in ion profiling

被引：0

作者：

Beshenkov, V.G. ^{[1
]}

Volkov, V.T. ^{[1
]}

Znamenskii, A.G. ^{[1
]}

Marchenko, V.A. ^{[1
]}

机构：

[1] IPTMEPM, Russian Academy of Sciences, Chernogolovka, Russia

来源：

| 2001年 / Gordon and Breach Science Publishers Inc.卷 / 16期

关键词：

Ion profiling;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

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