CN molecular negative-ion beam deposition and ion energy dependence of atomic bonds between carbon and nitrogen in the films

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作者：
Tsuji, H. [1 ]
Yoshihara, T. [1 ]
Nakamura, S. [1 ]
Gotoh, Y. [1 ]
Ishikawa, J. [1 ]
机构：
[1] Kyoto Univ, Kyoto, Japan
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1999年 / 148卷 / 1-4期
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页码：650 / 654
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