CN molecular negative-ion beam deposition and ion energy dependence of atomic bonds between carbon and nitrogen in the films

被引：0
|
作者：
Tsuji, H. [1 ]
Yoshihara, T. [1 ]
Nakamura, S. [1 ]
Gotoh, Y. [1 ]
Ishikawa, J. [1 ]
机构：
[1] Kyoto Univ, Kyoto, Japan
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1999年 / 148卷 / 1-4期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：650 / 654
相关论文
共 50 条
  • [1] CN molecular negative-ion beam deposition and ion energy dependence of atomic bonds between carbon and nitrogen in the films
    Tsuji, H
    Yoshihara, T
    Nakamura, S
    Gotoh, Y
    Ishikawa, J
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1999, 148 (1-4): : 650 - 654
  • [2] Dependence of carbon interatomic bonds on incident ion energy in carbon negative ion beam deposited films
    Tsuji, H
    Nakamura, S
    Gotoh, Y
    Ishikawa, J
    THIN SOLID FILMS, 1999, 343 : 17 - 20
  • [3] NEGATIVE-ION SOURCE (NIABNIS) AND PREPARATION OF TRANSPARENT CARBON-FILMS BY NEGATIVE CARBON ION-BEAM DEPOSITION
    ISHIKAWA, J
    OGAWA, K
    MIYATA, K
    TSUJI, H
    TAKAGI, T
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 205 - 208
  • [4] Extraction of molecular negative-ion beams of CN from radio frequency plasma-sputter-type heavy negative ion source for negative-ion beam deposition
    Tsuji, H
    Ishikawa, J
    Tomita, T
    Yoshihara, T
    Gotoh, Y
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (02): : 884 - 886
  • [5] EXISTENCE OF NEGATIVE-ION OF ATOMIC NITROGEN
    HIRD, B
    ALI, SP
    PHYSICAL REVIEW LETTERS, 1978, 41 (08) : 540 - 542
  • [6] Ion energy dependence of inter-atomic bonding state of carbon films deposited by low-energy carbon-negative ion beam
    Tsuji, Hiroshi
    Nakamura, Syuichi
    Yoshihara, Takaaki
    Gotoh, Yasuhito
    Ishikawa, Junzo
    Shinku/Journal of the Vacuum Society of Japan, 1999, 42 (03): : 221 - 224
  • [7] ATOMIC-COLLISIONS IN NEGATIVE-ION BEAM SIMULATION
    MICHAUT, C
    BACAL, M
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (04): : 1424 - 1426
  • [8] Development of heavy negative-ion sources and their application to ion implantation and ion beam deposition
    Ishikawa, J
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2006, 48 (04) : 703 - 710
  • [9] Carbon nitride thin films formed by low energy ion beam deposition with positive and negative ions
    Enders, B
    Horino, Y
    Tsubouchi, N
    Chayahara, A
    Kinomura, A
    Fujii, K
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 121 (1-4): : 73 - 78
  • [10] ENERGY RECOVERY FOR NEGATIVE-ION BASED NEUTRAL BEAM LINES
    HOPMAN, HJ
    NUCLEAR FUSION, 1989, 29 (04) : 685 - 689
12345