Scanning capacitance microscopy measurement of two-dimensional dopant profiles across junctions

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Kopanski, J.J.
Marchiando, J.F.
Berning, D.W.
Alvis, R.
Smith, H.E.
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Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 1998年 / 16卷 / 01期
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