Metallorganic chemical vapor deposition of AlGaAs using tertiarybuthylarsine

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[1] Ishikawa, Hironori
[2] Izumiya, Toshihide
[3] Mashita, Masao
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Ishikawa, Hironori | 1600年 / JJAP, Minato-ku, Japan卷 / 34期
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