'SMART' PRESSURE TRANSDUCER SIMPLIFIES, UPGRADES CONTROL SYSTEMS.

A new pressure transducer for computer control of jet engines incorporates and extremely small but powerful hybrid circuit. This circuit is used with a diaphragm sensor having multiple-pressure and temperature sensing elements, and integral NMOS operational amplifiers. The hybrid circuit includes a microcomputer, ROM and EEPROM (for storage of characterization data). It also includes elements for filtering, A/D conversion, buffering, address recognition, serial communication, and related functions. The new transducer's on-the spot signal amplification and conversion, and the fewer and shorter wires improve reliability and reduce signal loss and noise. The transducer's sensing element is in the form of an Integrated Pressure Capsule. This capsule contains a quartz diaphragm tht has an epitaxially grown silicon layer on one surface. This layer is precisely etched to give four stress and four temperature sensitive resistors.