Electrical properties of PECVD oxide films deposited at room temperature

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作者：

Louisiana State Univ, Baton Rouge, United States ^{[1
]}

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来源：

Electron Lett | / 21卷 / 2015-2016期

关键词：

Annealing - Chemical vapor deposition - Crystal orientation - Current density - Dielectric properties - Dielectric properties of solids - Electric breakdown - Electric conductivity - Electric variables measurement - Photolithography - Plasma applications - Semiconducting silicon compounds;

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