Boron carbide thin films deposited by tuned-substrate RF magnetron sputtering

被引：7
|
作者：
Pascual, E. [1 ]
Martinez, E. [1 ]
Esteve, J. [1 ]
Lousa, A. [1 ]
机构：
[1] Universitat de Barcelona, Barcelona, Spain
来源：
Diamond and Related Materials | 1999年 / 8卷 / 02期
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页码：402 / 405
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