Out-of-plane refractive microlens for free-space integrated optics

被引：0

作者：

UCLA, Los Angeles, United States ^{[1
]}

机构：

来源：

Conf Proc Laser Electr Optic Soc Annu Meet | / 459-460期

关键词：

Calculations - Helium neon lasers - Integrated optics - Micromachining - Microscopes - Optical collimators - Optical fibers - Photoresists - Semiconductor device manufacture - Semiconductor device structures - Substrates - Surfaces;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

An out-of-plane spherical microlens standing perpendicular to the substrate has been demonstrated for the first time using surface-micromachining technology. Light emitted from an optical fiber is successfully collimated by the microlens to a divergence angle of 0.15°, and the focal length is measured to the 645 μm. These microlenses can be combined with other out-of-plane micro-optical components on a silicon substrate to from a free-space micro-optical bench.

引用