PROPERTIES OF HYDROGENATED AND FLUORINATED AMORPHOUS SILICON-CARBON ALLOY FILMS PREPARED BY MAGNETRON SPUTTERING.

被引：0

作者：

Saito, N. ^{[1
]}

机构：

[1] Shizuoka Univ, Hamamatsu, Jpn, Shizuoka Univ, Hamamatsu, Jpn

来源：

Philosophical Magazine B: Physics of Condensed Matter; Electronic, Optical and Magnetic Properties | 1987年 / 55卷 / 05期

关键词：

This work is partly supported by (1985) Grant-in-Aid for Encouragement of Young Scientists (A) (No. 60750007) from the Ministry of Education; Science and Culture of Japan;

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引用

页码：615 / 625