Ion fractions in 6 keV Ne+, Ar+ and Na+ scattering from a GaAs(110) surface

被引：0

作者：

Gomez, G.R. ^{[1
]}

Gayone, J.E. ^{[1
]}

Grizzi, O. ^{[1
]}

Sanchez, E.A. ^{[1
]}

Pregliasco, R.G. ^{[1
]}

Martiarena, M.L. ^{[1
]}

Garcia, Evelina A. ^{[1
]}

Goldberg, E.C. ^{[1
]}

机构：

[1] Comision Nacional de Energia Atomica, S.C. de Bariloche, Argentina

来源：

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1997年 / 125卷 / 1-4期

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摘要：

引用

页码：268 / 272

共 45 条

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WOODYARD, JR
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Brzhezinskaya, M.
SEMICONDUCTORS, 2020, 54 (12) : 1702 - 1705
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[30] A SIMS study of embedded primary atom (Ar+ and Ne+) signals from Si and Ge surfaces under intense ion bombardment
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