Application of Ion Plating to Obtain Conductive and Transparent Thin Films of Indium and Tin Oxides.

被引：0

作者：

Machet, J. ^{[1
]}

Guille, J. ^{[1
]}

Robert, S. ^{[1
]}

Pauliat, A. ^{[1
]}

机构：

[1] UER des Sciences, Limoges, Fr, UER des Sciences, Limoges, Fr

来源：

Vide, les Couches Minces | 1983年 / 38卷 / 218期

关键词：

FILMS - Metallic - METALLIC COMPOUNDS - Plating - OXYGEN - SUBSTRATES - TIN COMPOUNDS - Thin Films;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

We study the realization by reactive ion plating of transparent and conductive thin films. Indium and tin are evaporated separately by Joule effect in presence of an rf disharge obtained in pure oxygen. The proportions of indium and tin oxides in the films are determined by controlling the rate of evaporation of these two metals by spectroscopic analysis of the light emitted in the discharge. The substrates are heated, in situ, during the deposition cycle, and thus all annealing are avoided. The electrical resistivity is 5. 10** minus **6 OMEGA . m. The transparency of a film 0. 5 mu m thick is greater than 85% in the visible region.

引用

页码：405 / 408

共 50 条

[31] HIGHLY CONDUCTIVE AND TRANSPARENT FILMS OF TIN AND FLUORINE DOPED INDIUM OXIDE PRODUCED BY APCVD
MAYER, B
THIN SOLID FILMS, 1992, 221 (1-2) : 166 - 182
[32] Substitution of transparent conducting oxide thin films for indium tin oxide transparent electrode applications
Minami, Tadatsugu
THIN SOLID FILMS, 2008, 516 (07) : 1314 - 1321
[33] Transparent conductive oxide thin films of tungsten-doped indium oxide
Li, Xifeng
Zhang, Qun
Miao, Weina
Huang, Li
Zhang, Zhuangjian
THIN SOLID FILMS, 2006, 515 (04) : 2471 - 2474
[34] Novel transparent conductive indium zinc oxide thin films with unique properties
Takatsuji, H
Tsuji, S
Kuroda, K
Saka, H
MATERIALS TRANSACTIONS JIM, 1999, 40 (09): : 899 - 902
[35] Growth of transparent electrical conducting films of indium and tin oxides by chemical vapor deposition
Atabaev I.G.
Hajiev M.U.
Pak V.A.
Zakirova S.B.
Juraev K.N.
Applied Solar Energy, 2016, 52 (2) : 118 - 121
[36] Ferromagnetism in transparent thin films of Fe-doped indium tin oxide
Ohno, Takahiro
Kawahara, Toshio
Tanaka, Hidekazu
Kawai, Tomoji
Oku, Masaoki
Okada, Koichi
Kohiki, Shigemi
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2006, 45 (33-36): : L957 - L959
[37] INFLUENCE OF GAMMA RAY ONTO TRANSPARENT INDIUM TIN OXIDE THIN FILMS
Mustapha, N.
Alkaoud, A.
Alyamani, A.
Idriss, H.
JOURNAL OF OVONIC RESEARCH, 2018, 14 (03): : 225 - 233
[38] DEFECT PROCESSES IN THIN FILMS OF METAL OXIDES.
Bassel, R.H.
Manning, I.
Chemical Technology Review, 1983, : 230 - 231
[39] Deposition of TiN thin films on Si(100) by HCD ion plating
Chou, WJ
Yu, GP
Huang, JH
SURFACE & COATINGS TECHNOLOGY, 2001, 140 (03): : 206 - 214
[40] INDIUM TIN OXIDE NANOSIZED TRANSPARENT CONDUCTIVE THIN FILMS OBTAINED BY SPUTTERING FROM LARGE SIZE PLANAR AND ROTARY TARGETS
Medvedovski, E.
Szepesi, C. J.
Yankov, O.
Lippens, P.
PROCESSING OF NANOPARTICLE MATERIALS AND NANOSTRUCTURED FILMS, 2010, 223 : 125 - +

← 1 2 3 4 5 →